Queensgate - Nanotechnology Instrumentation and Nanopositioning

Nano positioning technology and applications

NPS-Z-15L Ultra High Load Closed Loop 15 Micron Actuator

NPS-Z-15L Ultra High Load Closed Loop 15 Micron Actuator

The NPS-Z-15L is an Ultra High Load Closed Loop 15 Micron Actuator with an integrated capacitance position sensor. It is capable of sub-nanometer resolution and reproducibility. This stage has been designed for high stiffness to move large loads of up to 15KG.

With high stiffness and rugged construction, blocking forces of up to 35kN can be achieved. Super Invar construction ensures excellent thermal stability. An optional tungsten carbide ball end piece is available to aid mounting of the actuator in situ.

Downloads

Features

  • > 15 micrometer travel with sub-nanometer resolution
  • < 0.005% hysteresis and linearity error
  • First resonant frequency > 8 kHz
  • High bandwidths (> 1 kHz) and fast response times
  • In-situ scanning and stepping response optimization
  • Robust and reliable
  • Super Invar construction

Applications

  • Precision alignment of large masses, e.g. lenses, masks, wafer chucks and machine tools

Suggested Controller

  • NPC-A-1110DS Analogue
  • NPC-D-5110DS Digital

 

Send us a Product Enquiry »