- >15μm travel with sub-nanometer resolution
- Typically <0.005% hysteresis and <0.01% linearity error
- First resonant frequency >3.5KHz typical
- High bandwidths (>300Hz) and fast response times
- In-situ scanning and stepping response optimization
- Robust and reliable
- Super Invar construction
NPS-Z-15A Ultra Low Drift 15 Micron Stage
The NPS-Z-15A is a piezo-scanned flexure guided stage with integrated capacitance position sensors.
It is capable of sub-nanometer resolution and reproducibility.
This stage has been designed to have extremely low angular deviation from the axis of travel; it is ideal for use in scanning probe microscope tips and other applications where sideways motion is not tolerable.
NPS-Z-15A Ultra Low Drift 15 Micron Stage
The NPS-Z-15A is a piezo-scanned flexure guided stage with integrated capacitance position sensors.
It is capable of sub-nanometer resolution and reproducibility.
This stage has been designed to have extremely low angular deviation from the axis of travel; it is ideal for use in scanning probe microscope tips and other applications where sideways motion is not tolerable.
