- 100 μm closed loop displacement ay 80K in UHV
- Highly parallel motion with minimal off-axis deviation
- <1 nm position noise 0.01% linearity 0.02% residual hysteresis
- Customizable packages, vacuum and low temperature versions available
NPS-Z-500B Long Range 500 Micron Amplified Actuator
The NPS-Z-500B-UHV delivers over 100 µm full range at 80K at UHV. The stage is designed to operate in closed loop mode using capacitive positioning sensors. The advanced flexure design results in a highly linear device with outstanding resolution, repeatability, stiffness and stability. Low off-axis errors and a high resonant frequency further enhance the performance of this advanced design.
Suggested Controllers:
- NPC-D-6110
NPS-Z-500B Long Range 500 Micron Amplified Actuator
The NPS-Z-500B-UHV delivers over 100 µm full range at 80K at UHV. The stage is designed to operate in closed loop mode using capacitive positioning sensors. The advanced flexure design results in a highly linear device with outstanding resolution, repeatability, stiffness and stability. Low off-axis errors and a high resonant frequency further enhance the performance of this advanced design.
Suggested Controllers:
- NPC-D-6110
| Model | NPS-Z-500B | NPS-Z-500B-UHV |
| Axis | Z | Z |
| Range | 550um | 550um |
| Position noise | 1nm | 1nm |
| Repeatability | ||
| Linearity | 0.02% | 0.02% |
| Step Settle | 15ms | 15ms |
| Material | Aluminum/ Titanium | Aluminum/ Titanium |
| Size (L x W x H) | 60mm x 49.5mm x 30mm | 60mm x 49.5mm x 30mm |
