- Travel range:
- Z up to 100 µm
- Tip/tilt up to 0.4 mrad
- >100 mm clear aperture
- Load capacity 8 kg
- Materials: stainless steel and titanium
- Size: Ø165 x 70 mm
- Fast step-settle: <10 ms for a 1 µm (±40 nm)
NPS-Z-90Q Super-Heavy Objective Positioner
The NPS-Z-90Q has been designed to allow high-dynamic positioning of large objectives and optics with masses of up to 8 kg.
The stage has an aperture of >100 mm and a travel range of 100 µm. It can be configured purely as a Z position or as a 3-axis Z/tip/tilt system to allow active alignment of the payload.
The stage is capable of step-settle times of ≤10 ms with maximum load over a 1 µm step making the stage ideal for objective or other optic application in semiconductor manufacture, test and inspection, and large-scale scientific projects.
NPS-Z-90Q Super-Heavy Objective Positioner
The NPS-Z-90Q has been designed to allow high-dynamic positioning of large objectives and optics with masses of up to 8 kg.
The stage has an aperture of >100 mm and a travel range of 100 µm. It can be configured purely as a Z position or as a 3-axis Z/tip/tilt system to allow active alignment of the payload.
The stage is capable of step-settle times of ≤10 ms with maximum load over a 1 µm step making the stage ideal for objective or other optic application in semiconductor manufacture, test and inspection, and large-scale scientific projects.
