SP Mini-500 Compact Sample Positioner/Scanner
The SP-MINI-500 is an ultra-compact, long-range piezo stage which moves 500μm in closed loop. Its small footprint is ideal for easy integration within instrumentation or test equipment. The built-in capacitive positioning sensors enable ultra-high speed performance and low nanometer-level repeatability.
The stage has very low error motions, maintaining a very flat platform over its full 500μm travel range. This allows the sample holder to be offset, improving access to the sample whilst maintaining high performance positioning. Sample holders and stage mountings can be customized to suit a wide range of applications from microscopy, to hard disk testing and semiconductor inspection.
Suggested controllers:
Download datasheet
SP Mini-500 Compact Sample Positioner/Scanner
The SP-MINI-500 is an ultra-compact, long-range piezo stage which moves 500μm in closed loop. Its small footprint is ideal for easy integration within instrumentation or test equipment. The built-in capacitive positioning sensors enable ultra-high speed performance and low nanometer-level repeatability.
The stage has very low error motions, maintaining a very flat platform over its full 500μm travel range. This allows the sample holder to be offset, improving access to the sample whilst maintaining high performance positioning. Sample holders and stage mountings can be customized to suit a wide range of applications from microscopy, to hard disk testing and semiconductor inspection.
Suggested controllers:
Download datasheet
- >500μm travel with nanometer-level resolution
- Ultra-low rotation errors: 0.0025°
- Capacitive positioning sensor providing unrivalled position precision and accuracy. 2nm resolution and 5nm repeatability
- Typically <0.002% linearity error
- Dynamic performance: unloaded resonant frequency typically 210Hz and servo loop bandwidths up to 55Hz
- In-situ scanning and step response optimization
- Plug and Play: stage connector containing the stage calibration data and reference sensor allowing easy controller interchangeability
- High precision microscopy
- Hard disk inspection
- Semiconductor inspection and manufacture
- Scientific and medical instrumentation
| Model |
SP-MINI-500 |
| Axis |
Z |
| Range |
500um |
| Position noise |
2nm |
| Repeatability |
5nm |
| Linearity |
0.02% |
| Step Settle |
10ms |
| Material |
Aluminum/ Stainless Steel |
| Size (L x W x H) |
60mm x 35.5mm x 24.5mm |
SP-MINI-500 Ultra Compact Piezo Stage Datasheet
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